Docking and environmental purging system for integrated circuit wafer transport assemblies

ABSTRACT

The docking and purging system docks a modular isolation container for substrates used in manufacturing integrated circuits for purging and processing in a processing environment. A door portion of the docking and purging system includes a shelf for receiving the modular isolation container before insertion in a docking chamber formed in the housing connected for communication with the processing environment. A vacuum manifold with suction cups is provided for gripping and removing the modular isolation container door to allow access to the interior chamber of the modular isolation container. The docking chamber and interior chamber of the modular isolation container can also be purged of particulate contaminates by filtered air or inert gas ducted to the docking chamber.

RELATED APPLICATIONS

This is a continuation of Ser. No. 08/916,021 filed Aug. 21, 1997, nowU.S. Pat. No. 5,848,933, which was a continuation of Ser. No. 08/503,677filed Jul. 18, 1995, now U.S. Pat. No. 5,674,123.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates generally to systems for semiconductorfabrication, and more particularly concerns a docking and environmentalpurging system for docking a side loading or bottom loading modularisolation container for substrates used in manufacturing integratedcircuits within a processing environment, for removal of a door of themodular isolation container, and for purging such a modular isolationcontainer of particulate contaminates in the docking procedure.

2. Description of Related Art

Modular isolation containers have been designed that provide amicroenvironment to isolate and control the environment surrounding awafer, cassette of wafers or substrates used in manufacturing integratedcircuits. Such containers are commonly side loading or bottom loading,and are used to protect contaminate sensitive products such as wafers,masks, ceramic substrates and flat panel displays during processing andshipping.

Processing of such materials has been conventionally carried out in aparticulate free environment generally known as a "clean room".Maintenance of such "clean rooms" in a contaminate free state canrequire a great deal of care and effort, particularly during processingof the materials. Where human operators are used for transferring thematerials from such modular isolation containers, such as to a robotoperated processing environment, the operator is typically required towear bulky protective suits and helmets preventing the operator fromintroducing particulate contaminates into the processing environment.

It would therefore be desirable to provide a system for docking amodular isolation container, for either manually or robotically removinga side or bottom door of the modular isolation container. It would alsobe desirable that such a system provide for purging materials within thecontainer of particulate contaminates, for transferring such materialsfrom the localized modular isolation container environment to a cleanrobot operated processing environment, and that the system be centeredaround existing modular isolation containers to allow processing insmaller, controlled environments free of contaminates, contained withinan otherwise high particulate environment in which an operator canfreely work and move about. The present invention meets these needs.

SUMMARY OF THE INVENTION

Briefly, and in general terms, the present invention provides for animproved system for transferring materials such as wafers, cassettes ofwafers or substrates used in manufacturing integrated circuits from alocalized modular isolation container environment to a clean processingenvironment, to allow processing of the materials in small, controlledand isolated environments free of contaminates, contained within anotherwise high particulate environment, in which an operator can freelywork and move about, and for purging such materials of particulatecontaminates prior to processing of the materials.

The invention accordingly provides for a docking and environmentalpurging system and associated valving for purging a modular isolationcontainer for substrates used in manufacturing integrated circuits ofparticulate contaminates and docking the modular isolation containerwith a processing environment free of particulate contaminates. Themodular isolation container has an interior chamber for isolating thesubstrates from an environment exterior to the modular isolationcontainer. The modular isolation container typically has at least onedoor to the interior chamber for sealing the interior chamber from theambient environment, and allowing access to the contents of the interiorchamber. The docking and environmental purging system comprises a mainhousing defining a docking chamber connected for communication with theprocessing environment for receiving the modular isolation container. Adoor portion of the docking and purging system is also pivotallyconnected to the housing, and a shelf is typically hingedly mounted tothe door portion. The housing is typically mounted to or adjacent to awall of the processing environment to provide contaminate free, sealedaccess to the processing environment.

Means are provided for removing the modular isolation container door,which can open either from the side or the bottom, to allow access tothe interior chamber of the modular isolation container when the modularisolation container is disposed in the docking chamber. In one currentlypreferred embodiment, the means for removing the modular isolationcontainer door comprises a source of vacuum, a hollow vacuum manifoldconnected to the source of vacuum, and a plurality of suction cupsconnected to the source of vacuum through the vacuum manifold, forgripping the door, and for moving the door from a first closed positionto a second open position providing access to the interior of themodular isolation chamber.

Means are also provided for purging the contents of the interior chamberof the modular isolation container of particulate contaminates. In onecurrently preferred embodiment, the purging means comprises a source ofambient air, a blower, an air duct and a filter for providing a purgingflow of filtered air.

In another presently preferred embodiment, the purging means comprises agas manifold connected to a source of an inert purge gas, such asnitrogen. Means are also preferably provided for controlling oroperating the purging means and the means for removing the modularisolation container door.

These and other aspects and advantages of the invention will becomeapparent from the following detailed description, and the accompanyingdrawing, which illustrates by way of example the features of theinvention.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a front elevational view of a modular isolation container foruse with the docking and environmental purging system of the invention;

FIG. 2 is a top plan view of the modular isolation container of FIG. 1;

FIG. 3 is a perspective view of a first embodiment of a pole mounteddocking and environmental purging system according to the principles ofthe invention;

FIG. 4 is a front elevational view of a second embodiment of a polemounted docking and environmental purging system according to theprinciples of the invention;

FIG. 5 is a perspective view of a third embodiment of a hinge mounteddocking and environmental purging system according to the principles ofthe invention;

FIG. 6 is a perspective view of a fourth embodiment of a hinge mounteddocking and environmental purging system according to the principles ofthe invention;

FIG. 7 is a perspective view of a modular isolation door removal panelof a door portion of a docking and environmental purging systemaccording to the principles of the invention;

FIG. 8 is an exploded view of the door portion of the docking andenvironmental purging system of FIG. 7;

FIG. 9 is an exploded view of an alternative door portion for a dockingand environmental purging system according to the principles of theinvention;

FIG. 10 is a perspective view of a docking and environmental purgingsystem in a door closed position, with the modular isolation containerdoor removal panel lowered to remove the container door; and

FIG. 11 is a schematic diagram of a valve mechanism controller circuitfor the docking and environmental purging system of the invention.

DETAILED DESCRIPTION OF A PREFERRED EMBODIMENT

As is illustrated in the drawings, in which like elements are identifiedwith like reference numerals, the invention is embodied in a docking andenvironmental purging system for docking a modular isolation containerfor substrates used in manufacturing integrated circuits with aprocessing environment, removal of a side or bottom loading door of themodular isolation container, and for purging the modular isolationcontainer of particulate contaminates. The docking and environmentalpurging system includes associated valving, and permits the transfer ofsuch substrate materials from a localized modular isolation containertransport container environment to a processing environment.

With reference to FIGS. 1 and 2, the docking and environmental purgingsystem is useful for docking a modular isolation container with aprocessing environment free of particulate contaminates for transferringsemiconductor manufacturing materials contained in the modular isolationcontainer, such as wafers, cassettes of wafers or substrates used inmanufacturing integrated circuits, to a clean processing environment.The docking and environmental purging system is also useful for purgingthe modular isolation container of particulate contaminates prior toand/or during the transfer of materials from the modular isolationcontainer.

As is shown in FIGS. 1 and 2, a modular isolation container 20 typicallyhas an interior chamber 22 for isolating the substrates or wafers fromthe environment exterior to the modular isolation container. Theinterior chamber typically is provided with slots 24 for receiving andholding the wafers or substrates, a handle 26 to allow manual carryingand handling of the modular isolation container, and at least onevertical or horizontal loading door 28 to the interior chamber forsealing the interior chamber and providing access to the materialswithin the modular isolation container. One currently preferred type ofmodular isolation container for use with the docking and purge system ofthe invention is a modular isolation capsule available from EMPAK ofColorado Springs, Colorado under the trade name MiC. The modularisolation container is preferably hermetically sealed, may have acontinuous inert gas purge system, and can have single or dual doorsthat open to the side or bottom of the container.

Referring to FIGS. 3 to 6, the docking and environmental purging system30 preferably includes a main housing 32 defining a docking chamber 34for receiving the modular isolation container for transferring thesubstrate materials to be fabricated into integrated circuits. Thedocking chamber provides a passageway to, and is connected forcommunication with the processing environment, such as with a window 36in a processing clean room (not shown) with an elevator (not shown) fortransporting the modular isolation container within the processing cleanroom. A door portion 38 is connected to the main housing by a hinge 40,provided by the pole 42 in FIGS. 3 and 4, and provided by the suspendedsupport 44 in FIGS. 5 and 6. The door portion pivots between an open anda closed position, receives the modular isolation container in theambient environment in the open position, and forms a front cover 46 forthe window to the clean room processing environment in the closedposition. The door portion preferably is connected to the housing by aside hinge, although the door portion can alternatively be connected tothe door portion of the housing by a bottom hinge. In a currentlypreferred embodiment, the door portion includes a shelf 48 extendinghorizontally from the door portion for receiving the modular isolationcontainer. As is illustrated in FIG. 4, a storage or work surface 50connected to the main housing can also be provided.

Means 52 are also provided for supporting and connecting the docking andenvironment purging system to the processing environment, such as a polemount 54 adjacent to the window into a wall 56 of the processing cleanroom as shown in FIGS. 3 and 4. The docking and environment purgingsystem can alternatively be mounted by a hinge mount 58 connecteddirectly to the exterior of a wall of the processing clean room, asshown in FIGS. 5 and 6.

The door portion of the docking and environment purging system alsopreferably includes means 60 for removing a modular isolation containerdoor to allow access to the interior chamber when the modular isolationcontainer is disposed in the docking chamber. In one presently preferredembodiment, as illustrated in FIGS. 7 to 10, the means for removing themodular isolation container door comprises a source of vacuum, such asvacuum lines 62 connected to a vacuum pump (not shown), having a vacuumgauge 64 for monitoring the vacuum source, and a hollow vacuum manifold66 connected to the vacuum lines. The vacuum manifold preferablyincludes suction cups 68 connected through the vacuum manifold forapplying vacuum to the door of the modular isolation container to gripthe door, once the modular isolation container is placed on the shelfand positioned adjacent to the suction cups of the vacuum manifold. Thevacuum can be activated by an operator by the control keypad 70 locatedon the housing, once the modular isolation container is in position, toinitiate gripping of the modular isolation container door, preparatoryto opening the modular isolation container door and initiating the inertgas or filtered air purging of the modular isolation container. To openor remove the modular isolation container door, the vacuum manifoldmoves from a first closed position of the door typically downward to asecond open position for a bottom opening modular isolation containerdoor, as illustrated in FIG. 10, or to a side open position for a sideopening modular isolation container door. Alternatively, the modularisolation container door can also be opened manually once the modularisolation container is received on the shelf 48.

The docking and environmental purging system also preferably includesmeans 72 including associated valving for purging the contents of thedocking chamber, including the open modular isolation container, ofparticulate contaminates. In a presently preferred embodiment, a duct 74is provided for conducting ambient air through a filter 76 and blower orfan unit 78 to provide a clean purging flow of air to the dockingchamber. Alternatively, the duct can provide a flow of clean, inert gas,such as nitrogen gas, for example, for purging the contents of thedocking chamber of particulate contaminates. As is shown in FIGS. 3 and4, the flow of air or inert gas can be ducted through the pole mount, orthrough the hinge mount support as shown in FIGS. 5 and 6, to ventthrough the docking chamber or door portion. In one preferred embodimentillustrated in FIG. 9, the filtered air or inert gas purge can be ductedthrough the door portion and shelf of the docking and environmentalpurging system. The purging air or gas flow from the docking chamber istypically exhausted through an exhaust vent in the docking chamber andthrough an exhaust duct (not shown). The control membrane keypad 70 alsopreferably is operatively connected for controlling the means forpurging and the means for removing the modular isolation container door.

With reference to FIG. 11, control membrane keypad 70 of the docking andenvironmental purging system can be connected to a control circuit 80.In a presently preferred embodiment, the control circuit includes means82 for sensing that the modular isolation container is properly receivedand seated in the docking and environmental purging system, such as forexample, sensors 84a, b that can be pressure sensitive switches, orcontact switches, or the like, located on the shelf 48 or otherwise inthe docking chamber, for example. Once the modular isolation containeris sensed to be in position, an indicator light 86 switches on, filteredair or inert gas are turned on for purging, and the vacuum for removingand holding the door of the modular isolation container is switched on.A control button 88 can then be pressed for activation of the openingand removal of the isolation container door, while the whole isolationcontainer is held in place, and a control button 90 can be provided forclosing and resealing the isolation container door.

It will be apparent from the foregoing that while particular forms ofthe invention have been illustrated and described, various modificationscan be made without departing from the spirit and scope of theinvention. Accordingly, it is not intended that the invention belimited, except as by the appended claims.

What is claimed is:
 1. In a docking and environmental purging system forpurging the gas in a modular isolation container and docking the modularisolation container with a processing environment, said modularisolation container having an interior chamber and a door to theinterior chamber for sealing the interior chamber, the improvementcomprising:a vacuum manifold assembly for gripping and opening saidmodular isolation container door to allow access to said interiorchamber; and means for initiating gripping and opening of said modularisolation container door by said vacuum manifold assembly.
 2. Thedocking and environmental purging system of claim 1, wherein said vacuummanifold assembly comprises a plurality of suction cups for grippingsaid modular isolation container door.
 3. The docking and environmentalpurging system of claim 1, further comprising means for initiatingpurging of said modular isolation container with a purging gas.
 4. Thedocking and environmental purging system of claim 1, further comprisinga source of vacuum, said vacuum manifold assembly including a pluralityof suction cups connected for communication with said source of vacuumfor gripping said modular isolation container door.
 5. The docking andenvironmental purging system of claim 3, further comprising a ductconnected for receiving a supply of purging gas, a filter for filteringsaid purging gas, and a blower connected to said docking chamber forfluid communication therewith for purging the gas in said interiorchamber.
 6. The docking and environmental purging system of claim 5,wherein said purging gas comprises nitrogen.